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PECVD石墨舟

华熔科技石墨舟核心技术: 1. 行业首家二次纯化工艺,直接提高材料的 纯度,长周期工况条件下,石墨舟各点电阻率仍保持优异的均匀一致性,保证电流均匀,降低镀膜色差,同时有效减缓石墨舟的氧化,提高寿命。 2. Balance加工工艺,较好的消除石墨舟片内应力,长周期使用后不易…

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华熔科技石墨舟核心技术:

1. 行业首家二次纯化工艺,直接提高材料的 纯度,长周期工况条件下,石墨舟各点电阻率仍保持优异的均匀一致性,保证电流均匀,降低镀膜色差,同时有效减缓石墨舟的氧化,提高寿命。

2. Balance加工工艺,较好的消除石墨舟片内应力,长周期使用后不易变形,有效减少热延展80%以上。

3. 舟页表面C-coating涂层工艺,舟页表面平面度、光洁度更好、使舟页和硅片之间接触面积更大,饱和以后使用次数增加,舟使用寿命延长。

浙江华熔科技有限公司可以根据客户要求定制各种加长舟非标舟。

华熔科技团队拥有丰富的技术开发和生产业履历。产能可达到3000/月,可为客户开发设计生产整舟、配件、工装夹具等,同时可提供安装、维修、外包维护、培训等服务。

Zhejiang Harog Technology Co.,Ltd invested 40 millions RMB in the project of PECVD( Plasma Enhanced Chemical Vapor Deposition)graphite boat in Changxing county, Huzhou city, Zhejiang Province, covering an area of 10,000 m2 with the capacity of 1500 sets/month. The production scale is in the top 3 of this industry. Harog has more than 50 engineers and professional technical talents, and more than 10 patents( including the patents under process) . The team has rich experience in technology development and production. Harog can develop ,design and produce the complete boats, spare parts ,work fixtures and so on for customers. Meanwhile, Harog also offers assembling,repairement, maintainance,training and other services.